https://nova.newcastle.edu.au/vital/access/ /manager/Index en-au 5 Tilted beam piezoresistive displacement sensor: design, modeling, and characterization https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:28463 Sat 24 Mar 2018 07:39:34 AEDT ]]> A 2DOF SOI-MEMS nanopositioner with tilted flexure bulk piezoresistive displacement sensors https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:30312 Sat 24 Mar 2018 07:31:49 AEDT ]]> High-stroke silicon-on-insulator MEMS nanopositioner: control design for non-raster scan atomic force microscopy https://nova.newcastle.edu.au/vital/access/ /manager/Repository/uon:27540 Fri 10 Nov 2023 15:50:28 AEDT ]]>